Quantum Scalar i6000 User's Guide Page 28

  • Download
  • Add to my manuals
  • Print
  • Page
    / 106
  • Table of contents
  • BOOKMARKS
  • Rated. / 5. Based on customer reviews
Page view 27
Chapter 2: Description
Expansion Modules
22 Scalar i6000 Planning Guide
Figure 13 Magazine and Drive
Locations in Series 3 SEM with
a 24-slot I/E Station
Note: Series 3 modules require i12.2.1 firmware as well as gen2
electronics and robotics.
Page view 27
1 2 ... 23 24 25 26 27 28 29 30 31 32 33 ... 105 106

Comments to this Manuals

No comments